Journal Title

Journal of Vacuum Science and Technology B

Publication Date

11-1988

Abstract

Experiments have shown that the target current density in focused ion beam columns have long ‘‘tails’’ outside the central submicron region. We show that these tails result from a transverse velocity distribution which has a Holtsmark probability density. Both theory and experiment show that the tails are reduced as the system magnification and source current are reduced.

Subjects

Focused ion beams; Liquid metals--Thermal properties

Publication Information

Copyright 1988 American Vacuum Society. The original published version of this article may be found at http://dx.doi.org/10.1116/1.584117.

DOI

10.1116/1.584117

Peer-Reviewed

Yes

Document Type

Journal Article

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