Journal of Vacuum Science and Technology B
Experiments have shown that the target current density in focused ion beam columns have long ‘‘tails’’ outside the central submicron region. We show that these tails result from a transverse velocity distribution which has a Holtsmark probability density. Both theory and experiment show that the tails are reduced as the system magnification and source current are reduced.
Focused ion beams; Liquid metals--Thermal properties
Citation: Pilot Scholars Version (Modified MLA Style)
Ward, J. W.; Kubena, R. L.; and Utlaut, Mark, "Transverse thermal velocity broadening of focused beams from liquid metal ion sources" (1988). Physics Faculty Publications and Presentations. Paper 37.