Journal Title

Journal of Vacuum Science and Technology B

Publication Date

1987

Abstract

Operation of liquid–metalion sources based on palladium alloys that contain boron, arsenic, and phosphorus (singly or in combination) was studied. These sources, when run on refractory metal needles and heater ribbons, have exhibited high angular intensity (1.5–5 μA/sr), long lifetime (>150 h), low energy spread (eV), and stable operation with extracted currents down to 2 μA.

Subjects

Focused ion beams; Metal ions; Palladium alloys

Publication Information

Copyright 1987 American Vacuum Society. The original published version of this article may be found at http://dx.doi.org/10.1116/1.583862.

DOI

10.1116/1.583862

Peer-Reviewed

Yes

Document Type

Journal Article

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