Journal of Vacuum Science and Technology B
Operation of liquid–metalion sources based on palladium alloys that contain boron, arsenic, and phosphorus (singly or in combination) was studied. These sources, when run on refractory metal needles and heater ribbons, have exhibited high angular intensity (1.5–5 μA/sr), long lifetime (>150 h), low energy spread (eV), and stable operation with extracted currents down to 2 μA.
Focused ion beams; Metal ions; Palladium alloys
Citation: Pilot Scholars Version (Modified MLA Style)
Clark, W. M. Jr.; Seliger, R. L.; Utlaut, Mark; Bell, A. E.; Swanson, L. W.; Schwind, G. A.; and Jergenson, J. B., "Long-lifetime, reliable liquid metal ion sources for boron, arsenic, and phosphorus" (1987). Physics Faculty Publications and Presentations. Paper 36.